Tools
| Equipment | Location | Status | User Manual |
|---|---|---|---|
| ABM Mask Aligner | 2055B | On-line | View |
| KLA Tencor Stylus Profilometer | 2055B | On-line | View |
| SCS Spin Coater | 2055B | On-line | View |
| EMS Vacuum Hotplates | 2055B | On-line | View |
| Cleanroom Oven | 2055B | On-line | View |
| Lindberg Vacuum Oven | 2055B | Testing | View |
| YES Plasma Cleaner | 2055B | Testing | View |
| Spin Dryer | 2055C | Testing | View |
| Thermal Evaporator | 2055C | Off-line | View |
| Hybond Wire Bonder | 2055 | Off-line | View |
Supplies Provided
Cleanroom apparel: jumpsuit, cleanroom gloves, covers for shoes, hair, and beard (if applicable)
Selected solvents: isopropanol, acetone (Note: others may be made available upon request)
Auxiliary equipment: refrigerator, analytical balance
Microfabrication tools and supplies: wafer tweezers, razor blades, scissors, tape, punch tools, cleanroom wipes, glassware, plastic petri dishes
A MilliQ water purification system supplies Type 1 ultrapure water.
Log-in Software
The log-in software enables us to track usage of the facility. Users need to log in when they get in, and log out as they are leaving so they will be billed properly. Here is a guide for the log-in software.